JPH02146155U - - Google Patents
Info
- Publication number
- JPH02146155U JPH02146155U JP5338389U JP5338389U JPH02146155U JP H02146155 U JPH02146155 U JP H02146155U JP 5338389 U JP5338389 U JP 5338389U JP 5338389 U JP5338389 U JP 5338389U JP H02146155 U JPH02146155 U JP H02146155U
- Authority
- JP
- Japan
- Prior art keywords
- wall
- vacuum evaporation
- electrons
- reflected
- electron gun
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007738 vacuum evaporation Methods 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338389U JPH02146155U (en]) | 1989-05-11 | 1989-05-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338389U JPH02146155U (en]) | 1989-05-11 | 1989-05-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02146155U true JPH02146155U (en]) | 1990-12-12 |
Family
ID=31574516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5338389U Pending JPH02146155U (en]) | 1989-05-11 | 1989-05-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02146155U (en]) |
-
1989
- 1989-05-11 JP JP5338389U patent/JPH02146155U/ja active Pending
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